Convertible Bell Jar for Small-Scale Production and R&D Applications

Temescal’s BJD-2000 and FC-2000 are versatile evaporation systems that accept a variety of accessories to meet almost any requirement. Engineered for efficient operation and clean room compatibility, these systems combine maximum flexibility with ease of use. The FC-2000 is a fast- cycle, load-locked system that allows the source to remain under vacuum during substrate reloading. The BJD-2000 is non-load-locked.

Convenient Maintenance

The offset pumping port, the hinged door panels, and the swingout source tray are high-value maintenance features in Temescal bell-jar systems. The offset pumping design reduces unscheduled downtime by minimizing the possibility of debris entering the pumping module. The hinged door panels open to the pumping system and the vacuum chamber. The electric hoist and the swing-out source tray facilitate access for evaporant reloading, cleaning, and maintenance. Access to the water manifold, the bellows-sealed high-vacuum valve, and other pumping system components is also simple and direct.

Key features:

  • Non-load-locked BJD-2000 and load-locked FC-2000, both with a single cryopump
  • Source tray supports multiple electron beam and resistance sources
  • Standard source-to-substrate distance: 19.5″
  • S-S distance with optional source well extension collar: 27.5″
  • Field upgrade kit allows conversion into an FC-2800 or a BCD-2800

System

  • University, R&D, Pilot Production
  • Product Chamber Type: bell jar
  • FC-2000 Load lock to isolate Product Chamber
  • Cryopump water L/sec: 4,000
  • FC-2000 Pump down time: 1E-06 < 10mins
  • BJD-2000 Pump down time: 1E-06 < 15mins
  • E-gun (max pkg): 4x25cc PopTop + 1 fixed pocket
  • E-gun Power Supply: 6 or 12 kW
  • Ion gun: MKI filament
  • Max wafer count: Lift off 42×2″, 13x100mm
  • Source to Substrate: std 19.5″
  • Source to Substrate: ext 27.5″

System Control

  • Temescal Control System (TCS), with Auto, Manual modes plus process datalogging
  • Security code-based access for multiple classes of users
  • TCS-based process variable monitoring (PVM), allowing user to set tolerance alarms for critical process variables
  • 17″ high resolution color touch screen interface

E-Beam

  • Temescal 4- or 6-pocket Standard or PopTop turret source
  • Temescal model CV-6SLX or CV-12SLX e-beam power supply (Simba option available)
  • TemEBeam Contoller: Sweep, Index, Gun & HV

Substrate

  • Lift-off dome or dome frame with segments
  • Step coverage High Speed Planatary
  • Flip tooling: allows for two sided or edge coating
  • VAP: Variable Angle Planatary

Vacuum Pumping & Control

  • Market leading dry roughing pump >60 cfm (102 m3/h)
  • CTI On-Board Cryopumps
  • Cryopump temperature monitoring
  • Active Inverted Magnetron gauges and Pirani controllers, monitored and controlled by the TCS

Product Chamber

  • Dimensions in inches: 20 bell jar
  • FC-2000 Product chamber cryopump: CT-400 17,500 L/Sec
  • Water cooled product chamber walls
  • Two sets of product chamber evaporation shields
  • Wide-angle viewport on front of system
  • One fixed uniformity mask
  • Spare port(s) for RGA or alternate access

Source Chamber

  • Source chamber cryopump: CT-8, 4,000 L/Sec
  • FC-2000 Source Tray Dimensions in inches: 20
  • BJD-2000 Source Tray Dimensions in inches: 18
  • Drop-down, swing-out source tray, accessible from either clean room or chase side of vacuum cubicle
  • Wide-angle 4” viewport
  • Removable stainless-steel source shields

Water & Air System

  • Stainless steel manifold provides cooling water for source and product chamber components
  • Separate product chamber circuit for cold and optional hot water
  • TCS-controlled auto-blowdown for turret source
  • PLC-controlled air manifold

System Wide

  • 3 EMO switches
  • Standard 19” wide electronics rack on casters
  • Surfaces exposed to high vacuum are made of 304 SST

 

Temescal Control System

The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. Operating in any of three password-protected modes, the TCS also offers process variable monitoring, process and historical trend tracking, and process data logging.

TCS System Map During Deposition

 

The TCS Automatic Mode

Auto mode operation provides fully automated execution of user-programmed recipes consisting of up to twenty process steps, as well as full abort diagnostics. The TCS Auto Mode also offers independent autopump and autovent operations, automated cryopump regeneration, and automated rate-of-rise testing.

Manual Mode Operation

The TCS manual mode enables the user to set process parameters, operate major components and subsystems individually with full interlock protection, and execute nonautomated single-film deposition processes.

Service Mode Operation

The TCS service mode provides noninterlocked low-level control over any of the system’s valves, pumps, motors, or power supplies.

 

Options

System control

  • SECS/GEM interface to TCS
  • Chamber temperature monitoring
  • TCS-controlled auto-blowdown for turret source
  • TCS simulator for off-line training and process development
  • A second XTC/3 deposition controller to support codeposition

Electron beam source, power supply and sweep

  • Upgrade to Temescal’s PopTop source
  • Up to three resistance sources
  • 8-in. source well extension collar
  • One additional fixed e-beam source
  • One wire feeder on dual-source systems
  • Dual wire feeders on single-source systems
  • A second SS64 programmable beam sweep controller

Vacuum pumping and control

  • Soft roughing and venting under TCS control
  • Upgrade to a higher-capacity mechanical pump

Vacuum chamber

  • Substrate heaters
  • One 3-cm ion source
  • A residual gas analyzer
  • Process gas control for up to three gases
  • Vacuum chamber and bell jar hot water circulation

Process

  • Additional uniformity (shadow) masks
  • Process development and film characterization
  •  

 

System Plan View, Showing Dimensions of Major Components

Download PDF of drawing

FC/BCD-2000 facility and installation guide

Download PDFFC/BCD-2000 Guide

Temescal FC-2000 Deposition System

For more information or to start a quote on a complete system

Product Capacity Catalog # Add product
Temescal FC-2000 deposition system FC-2000


BCD/FC-2000 O-ring & shield kits

Product Capacity Catalog # Add product
O-ring kit
Select this to request O-Ring Kit information.
0629-2355-0
Shield kit
Select this product to request Shield Kit information.
0627-3605-3

 

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